N2, O2, H2, NH3, CO, CO2,...
CDA (Clean Dry Air)
NMHC = Non Methane Hydrocarbons C5-C30
Organics = Hydrocarbons C5-C30
THC = Total Hydrocarbons C1-C30
Arsine (AsH3) or Phosphine(PH3) Gas
Xenon, Neon, Krypton, Argon,...
Fluorinated Gases: [C2F6, C2H6, C3F8, C3H8, C2F4H2,
C4F8, C4H10, CCl4,CF4, CH4, CHF3, SF6 ]
Corrosive and Specialty Gases: HCl, Cl2, BCl3, H2S,
etc..
[B2H6, BCl3, CClH3, Cl2, CO2, GeCl4, GeH4, H2S,
H2Se,HBr,HCl, N2O, NF3, NO, SiCl4, SiF4, SiH2Cl2,
SiHCl3, SO2, CHClF2, BF3 ] |